CAS No.: | 7783-54-2 |
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Formula: | NF3 |
EINECS: | 232-007-1 |
Constituent: | Industrial Pure Air |
Grade Standard: | Electronic Grade |
Chemical Property: | Non-Flammable Gas |
Customization: |
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Impurities | NF3 ≥ 99.995% | NF3 ≥ 99.99% | NF3 ≥ 99.98% | NF3 ≥ 99.9% |
CF4 | ≤20 Vol.ppm | ≤40 Vol.ppm | ≤100 Vol.ppm | ≤500 Vol.ppm |
N2 | ≤5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
O2+Ar | ≤3 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
CO2 | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
H2O | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
HF | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
SF6 | ≤1 Vol.ppm | ≤2 Vol.ppm | ≤2 Vol.ppm | ≤25 Vol.ppm |
N2O | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
CO | ≤0.5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
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