Inherent Frequency: | 1-2Hz, Vertically; 1-2 Hz, Horizontally |
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Vibration Isolation Structure: | Compound Rubber Pads and Hollow Cone Rubber Struct |
Levelling Type: | Automatic, Air Spring |
Vibration Isolation Efficiency: | 82-88%@5Hz, 86-95%@10Hz, Vertically |
Vibration Isolation Efficiency(Horizonta: | 78-86%@5Hz, 84-92%@10Hz, Horizontally |
Table Height: | 800mm or Customized |
Customization: |
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Inherent Frequency | Vertical:1.0~2.0Hz Horizontal:1.0~2Hz |
Isolating mode: | Air spring and bulb self-centering pendulum-bar |
leveling: | Self-leveling and auto control |
Damping Mode | Air damping holes |
Height | 800mm |
Working pressure | 0.2~0.4MPa |
Air source | Silent Compressor <50dB |
Amplitude | <1μm |
Repeating Accuracy | ±0.1mm |
Surface Plate Flatness | ≤0.05mm/m² |
Roughness | ≤0.8μm,Matt finishing |
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