Zhengzhou, Henan, China
Member Since: 2019
This is a three-zone rotary tube furnace with a feeder and a receiving tank. The feeder can feed the powder into the furnace tube at a rated rate, and the powder material can be continuously coated by the CVD method under the atmosphere protection environment. The receiving tank can collect the processed powder in an atmosphere protection environment.1200C 2-5" Single Zone Hot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealing
The rotary tube furnace is widely used for sintering inorganic compounds, and the working tube can be rotated 360° by mechanical transmission, so that the materials in the tube are stirred and mixed to obtain uniform heating effect.
This tube furnace is designed to coat the conductive layer on the cathode material of Lithium-ion battery (such as LiFePO3, LiMnNiO3), and also to prepare Si/C anode material by CVD method.
Vacuum tube furnace
Furnace chamber length
Heating zone length
Constant temperature zone
Temperature control accuracy
Temperature control mode
30 or 50 segment program temperature control
304 stainless steel vacuum flange
1/4" cutting sleeve joint, KF16/25/40 joint
Gas supply system
Gas float flow meter
A channel: 0~100ml H2 gas
Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 16~160ml N2 gas
C channel: 25~250ml Ar gas
Pipe pressure resistance
Working pressure difference
304 stainless steel
304 stainless steel needle valve
1/4" cutting sleeve joint for gas inlet and outlet
Hot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealing
· One year, We provide permanent technology support.Warranty period appear quality problems free maintenance.After the warranty we need to replace parts we provide at cost price.
· Any technology question, we can provide video instruction, remote video instruction or fly to your country.
· Any problem we will handle in time within 24 hours
fessional QC team and every steps of processing we will strictly on quality.
· Our products will be conform international standards and has the CE certificate.
Servicing equipment during a breakdown is the worst possible scenario. System failure is unexpected, surprising and always at the wrong time. Alarge is prepared to deal with these situations. In order to raise the service reliability of your equipment, we offer comprehensive support services.
The engineering team at HIQ has the knowledge and experience to manage fleets of heat treating equipment in a planned and professional manner regardless of the equipment manufacturer. The solutions we offer are universal because they are based on best practices for failure prevention in the best sense of the word. Professional Technical Services provided by HIQ is more than the repair in case of failure. We understand how the equipment works and we increase uptime with the help of automated process maintenance that supports equipment architecture and technology solutions including renovation, modernization, and relocation services. Alarge carries out preventive inspections and the subsequent preventive measures using advanced tools in the field of metering and reporting.
You no longer have to worry about downtime and additional costs.
HIQ services are available around the clock, 7 days a week.